This document provides terminology, methods, and criteria for characterizing the internal structural features of monolithic, ceramic dielectric capacitors. Its major objective is the accurate evaluation of the internal physical quality of the chip capacitor element as it relates to the functional reliability of the finished capacitor. This Standard also provides needed and useful information pertaining to activities associated with destructive physical analysis (DPA), such as post-decapsulation visual inspection and DPA reporting. In addition, it provides tutorial help for problems inherent in DPA sample processing.