DS DS/EN 61094-6
DS DSEN 61094-6 2005-SEP-01 Measurement mcrophones - Part 6 Electrostatc actuators for determnaton of frequency response
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This standard gives guidelines for the design of actuators for microphones equipped with electrically conductive diaphragms, gives methods for the validation of electrostatic actuators and gives a method for determining the electrostatic actuator response of a microphone.