IEST RP-CC028.1
EST RP-CC0281 2002-SEP-01 MNENVRONMENTS
The purpose of this document is to provide a framework for describing minienvironments for microelectronics and similar applications.
Applications, planning, design, and evaluation are discussed in detail.
This Recommended Practice is intended to stimulate discussion of specifications and configurations for a specified application between the supplier and customer.This Recommended Practice does not address microbiological issues or applications.