This test procedure covers production testing of filters for particle penetration and pressure drop of ultralowpenetration air (ULPA) filters. The penetration range of the procedure is 0.0010% to 0.00010%, using particle counters.

This Recommended Practice (RP) describes the equipment, aerosol properties, processes, and calculations for determining the efficiency of ULPA filters, using particle counters. The procedure may be applied to production applications. This RP provides guidelines for constructing a suitable test duct and sampling system. Also provided are test criteria for quantifying penetration in the range of 0.0010% to 0.00010%, using test aerosol particles in the size range of 0.1 to 0.2 µm.