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CGA G-14

CGA G-14 2010-JAN-01 NTROGEN TRFLUORDE-Second Edton

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Scope and purpose

Because of its widespread use and its potential for mishandling, this publication has been written and is intended for the suppliers, distributors and users of nitrogen trifluoride and its handling equipment. Its purpose is to provide a good understanding of the potential hazards involved in handling nitrogen trifluoride and the approach to be taken to minimize the risk of incidents.

The manufacture, purification, and analysis of nitrogen trifluoride are beyond the scope of this publication, although the general guidance given is also relevant to these processes.

Within the appendices of this publication are an EIGA Material Safety Data Sheet and audit checklists.

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