This standard governs the installation of systems and sources that are used to store, transfer, or contain silane or silane mixtures. The scope of this standard includes guidance for siting, design of equipment, piping and controls, and the fabrication and installation of silane gas storage and closed-use systems. Additional guidance on operational steps associated with the use of silane and silane mixtures as well as fire protection, gas monitoring, ventilation, and related safeguards are provided.

Application: The requirements of the standard apply to pure silane and silane mixtures with a silane content greater than 1.37% [3]. A concentration of 1.37% has been chosen as it represents the lower flammable limit (LFL) for the material in air under conditions of normal temperature and pressure. Silane containers include tube trailers, ISO modules, cylinder packs with manifolded cylinders, and individual cylinders.

Limitations: This standard is not intended to provide requirements beyond the first point of control within a user's facility where connections are made to piping systems associated with internal transmission and/or use of this material.

The following subjects are outside the scope of the standard:

– Equipment downstream of a gas cabinet with the exception of valve manifold boxes (VMBs) when VMBs are used;

– Off-site transportation of compressed gases regulated by the Department of Transportation (DOT); and

– Requirements within the jurisdiction of local, state, provincial/territorial, federal regulatory authorities with laws or regulations that preempt the provisions of this standard. When such is the case, it is recommended that the authority having jurisdiction be guided by this standard in determining requirements.

This standard is not intended to replace or fulfill the requirements of a Risk Management Program (RMP) as mandated under Section 112(r) of the Clean Air Act (CAA), generally referred to as the Environmental Protection Agency (EPA) RMP rule. A full risk management program is comprised of a hazard assessment, a management system, a prevention program, and an emergency response program. Such programs and assessments must be developed on a case-by-case basis in response to the requirements of the RMP and the circumstances found at each individual company where silane is stored or used.

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