DS DS/EN ISO 14644-8
DS DSEN SO 14644-8 2006-AUG-30 Cleanrooms and assocated controlled envronments - Part 8 Classfcaton of arborne molecular contamnaton
DS DSEN SO 14644-8 2006-AUG-30 Cleanrooms and assocated controlled envronments - Part 8 Classfcaton of arborne molecular contamnaton
This standard covers the classification of airborne molecular contamination (AMC) in cleanrooms and associated controlled environments in terms of airborne concentrations of specific chemical species (individual, group or category) and provides a protocol to include test methods, analysis and time weighted factors within the specification for classification.